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Plus de détailsThe samples used in this research started as 4-in <100> silicon wafers. A 1 μm thermal oxide was grown over the entire wafer to electrically insulate the TE device material from the silicon. Various metal pads were then defined using a standard lithography process (AZ5214) and lift-off in acetone (50 °C for 2 h).
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Plus de détails2800 Powder Mill Road, Delphi, MD 20783, USA Dr. R. J. Kaplar Material, Physical, and Chemical Sciences Center Sandia National Laboratories PO Box 5800, Albuquerque, NM 87185-1086, USA E-mail: [email protected] Prof. S. Rajan Electrical and Computer Engineering and Materials Science and Engineering Departments Ohio State University
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Plus de détailsEarly studies established that air adsorbates could lead to a two‐dimensional hole gas (2DHG) with a sheet charge density in the 10 14 cm −2 range. 113 While these air‐exposed surfaces are notably unstable, lateral metal–oxide‐semiconductor field‐effect‐transistor (MOSFET) devices have now been fabricated with atomic‐layer ...
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